Soft-EPi produces a variety size of semi insulating GaN substrates requested by customers.
Semi insulating GaN
Semi-insulating GaN
| Substrate | Sapphire |
| Wafer Size | 2, 4, 6-inch |
| Thickness | 3 ~ 5 ㎛ (± 0.3 ㎛) |
| Orientation of GaN | C-Plane |
| Resistivity (300K) | > 106 Ω·cm |
| Carrier Concentration | > 2E1018 cm-3 (C-doping concentration) |
| Surface Roughness | < 0.3nm |